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High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology download epub

by Lynwood Swanson,Mark Utlaut,Jon Orloff


Epub Book: 1977 kb. | Fb2 Book: 1251 kb.

There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject. Show all. Table of contents (7 chapters)

Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials.

Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM). However, while the SEM uses a focused beam of electrons to image the sample in the chamber, a FIB setup uses a focused beam of ions instead.

Ion Optics and Their Application to Focused Ion Beam Technology.

Электронная книга "High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology", Jon Orloff, Lynwood Swanson, Mark Utlaut. High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology.

There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair.

Focused ion beam (FIB) really became a nanofabrication tool following the introduction of liquid metal ion sources (LMIS). On the one hand, a focused ion beam can machine a material by sputtering away the material. On the other hand, a focused ion beam combined with chemically active gases can deposit materials onto a substrate. A focused ion beam can also implant different atomic species into a substrate by using ion sources consisting of different liquid materials.

Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 5. Practical Focused Ion Beam Optics and Systems. 4. Interactions of Ions with Solids. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields.

FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology. by Jon Orloff, Lynwood Swanson, Mark Utlaut. Published 2003 by Kluwer Academic/Plenum Publishers in New York, NY.

FIB is based on similar technology as SIMS Primary ion beam Secondary ions. Ion source and optics. Ion-solid interaction, damage

FIB is based on similar technology as SIMS Primary ion beam Secondary ions. Ion-solid interaction, damage. Scanning ion beam imaging. Electron bombardment ion sources.

Orloff, . Utlaut, M. and Swanson, . .High Resolution Focused Ion Beams: FIB and its Applications, (New York: Kluwer Academic/Plenum Publishers, 2003), pp. 21–77. Testing and Failure Analysis (1993), pp. 405–14. Orloff, . 147–52.

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.

Comments: (4)

Gandree
First, I must say that I am reviewing this book from a side of scientist who wanted to learn mostly on applications and on related physics necessary to understand a topic of application itself.

Minuses of the book:
-Book is not thorough on application. One-day review of journal publications would do better. I did expect much more, much much more on application, especially when much more is present at the field.
-Pictures are of the lowest quality I have ever seen in 2k book. It is something one would expect from the book printed in 50ties. Even then they had extra photo sheets if needed. Check the photos on cover - such a quality you will not see in the book. This was very disappointing for me - on some pictures you even miss the point of an image because of the lack of quality. I was seriously thinking of returning a book (I never did that before). Picture low quality is that overwhelming at first touch that any possible value what book can possibly give can be lost.
-half of book is on LMIS and such an approach is not what I was looking for - this is not a mistake of the book itself - it is a mistake of reviews present here and mostly of description of the book here.
- (for me it was deficit as space was lost on what I did not looked for but can be advantage if someone is looking for this approach)lot of math-physics which I do think is for advanced user and especially everyday user of FIB.

Pluses of the book:
-nicely described channeling effect. One who is looking for such a explanation can take this book as a first reference.
- If someone is looking for thorough description about LMIS - this is the book.

In short way - not as introductory book for students. I find one half of book completely out of my interest even thought I do love FIB and I am a thorough user of its applications.

I am in need to buy Lucille A. Giannuzzi and to see what is in there - its also cheaper.

And one way comment about the price - 150+USD for such a print quality is just a steeling - no offense.
EROROHALO
The Focused ion beam (FIB) technique has come to be considered particularly useful, both as a method for fabricating transmission electron microscopy (TEM) samples, and as a way of patterning surfaces. FIB is increasingly important in electronics research and development, from the sputter profiling of integrated circuits, to extracting cross-sections of devices for analysis by TEM. The authors lay the theoretical foundation for this technique, including the physics of ion optics and scattering, and the design of metal ion sources. This book also contains a number of figures illustrating the results of FIB fabrication.
Larosa
As a researcher working in the field of focused ion beams for almost thirty years, I can honestly say that this is the finest book ever written on the subject. Their treatment of the Fowler-Nordheim equation is particularly noteworthy.
More importantly, their use of rhyme, ala Dr. Seuss, makes for an easy read. Here's a short excerpt from the book's introduction which illustrates my point.
"An ion is so very small
You'll never see one in the hall
You'll never see one at the mall
You'll never see one at your house
You'll never see one with a mouse
These tiny things you'll never see
Are still very useful to you and me
They're also useful to industry."
Cae
Excellent reference with good balance between theoretical discussion and practical data, very thorough bibliography. The best single source of concentrated information for anyone using or building FIB systems.
Section on Applications of Focused Ion Beams could be significantly expanded in future editions, as the industrial applications of the FIB advance rapidly.
High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology download epub
Engineering
Author: Lynwood Swanson,Mark Utlaut,Jon Orloff
ISBN: 030647350X
Category: Engineering & Transportation
Subcategory: Engineering
Language: English
Publisher: Springer; 2003 edition (October 31, 2002)
Pages: 304 pages